Integrated Circuit Fabrication

Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook. It includes an early introduction of a state-of-the-art CMOS process flow, exposes students to big-picture thinking from the outset, and encourages a practical integration mindset. Extensive use of process and TCAD simulation, using industry tools such as Silvaco Athena and Victory Process, provides students with deeper insight into physical principles, and prepares them for applying these tools in a real-world setting. Accessible framing assumes only a basic background in chemistry, physics and mathematics, providing a gentle introduction for students from a wide range of backgrounds; and over 450 figures (many in color), and more than 280 end-of-chapter problems, will support and cement student understanding. Accompanied by lecture slides and solutions for instructors, this is the ideal introduction to semiconductor technology for senior undergraduate and graduate students in electrical engineering, materials science and physics, and for semiconductor engineering professionals seeking an authoritative introductory reference.

• An up-to-date guide to the science and technology of fabricating modern semiconductor ICs, applicable to silicon, compound semiconductor and MEMS devices that ensures students fully understand the field today
• Covers cutting-edge industry-standard technologies, which prepares students for a smooth transition to careers in industry
• Introduces and describes a complete, state-of-the-art CMOS process flow early in the book, which provides students with an immediate overview and broad context to clearly understand technologies introduced in later chapters